小流量混氣設備

Low Flow Mixer

小流量混氣設備可依照製程需求彈性變更混配濃度以達到節省用氣所需的相關設備（如氣瓶櫃與VMB/P數量）以及相關安全Sensor（如毒氣偵測器，UVIR…等）。並節省原物料鋼瓶的採購費用，以及更換鋼瓶人工/相關Utility/GMS/GDS/設備維護成本等的費用。

The low flow mixer is capable of changing with the flexible mixing ratio according to the specific process requirement, in order to save the necessary gas equipment (such as the quantity of gas cylinder cabinet, VMB, & VMP needed), as well as the relevant safety sensors (toxic gas detector & UVIR, etc.) and thus to reduce the cost of purchasing the extra gas cylinders, the labor cost of changing cylinders, as well as the maintenance cost of relevant utility, GMS, GDS, etc.