氣瓶櫃
Gas Cabinet
是為特殊氣體所設計的安全箱體，並合乎了所有必須的安全法規。連續供應氣體至各製程設備埠或閥門分支箱，閥門分支盤等。
It is the safety cabinet designed for special gas, which is compliant with all compulsory safety codes. The gas cabinet is capable of continuously supplying gas to each specific equipment port or VMB & VMP, etc.