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混氣設備是將兩種氣體按一定比例摻混一起達到客戶所需要的氣體濃度比。本設備採用質量流量計以體積比的方式混配氣體濃度。輔氣源會因主氣源的流動多寡,經由PLC精算後自動配合主氣源的流量值而流出所設定的流量比,以達到高精度的濃度比。
The mixer is designed for mixing two different gases at certain ratio to achieve the requested gas concentration by customer. It adopts the mass flow controller to mix the gases by volume ratio. With the PLC precision calculation, the secondary gas supply will automatically dispense the gas at the assigned flow ratio according to master gas supply’s flow volume to achieve the high precision gas concentration.